MAE5700

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MAE5700 - Introduction to Microfabrication - 3 - Credits

Mechanical & Aerospace Engineering College of Engineering

Course Prefix

MAE

Course Number

5700

Department

Mechanical & Aerospace Engineering

Cross-Listed Courses

Course Title

Introduction to Microfabrication

Grade Mode

Standard Letter

Repeat Status

Course Description

This course covers materials, wet chemical cleaning and etch, photolithography, metal deposition, doping, carrier density and conductivity, microfluidics, and micro-electronic-mechanical-systems.

Credit Hours

Credit Hours Min

Registration Restrictions

Admission to the Professional Engineering Program

Special Approval

Instructor permission