Nov 23, 2024  
2023-2024 General Catalog 
    
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MAE 5700 - Introduction to Microfabrication


3 credit(s)

This course covers materials, wet chemical cleaning and etch, photolithography, metal deposition, doping, carrier density and conductivity, microfluidics, and micro-electronic-mechanical-systems.

Prerequisite(s): PHYS 2210  or PHYS 2310 PHYS 2215 PHYS 2220  or PHYS 2320 PHYS 2225 

Registration Restriction(s): Admission to the Professional Engineering Program or graduate standing

Registration Restriction Special Approval: Instructor permission

Cross-listed as: BENG 5700 ECE 5700 PHYS 5700   
Repeatable for credit: No
Grade Mode: Standard

Course changes effective: Fall 2021