Aug 23, 2019  
2013-2014 General Catalog (Summer, Fall 2013) 
    
2013-2014 General Catalog (Summer, Fall 2013) [ARCHIVED CATALOG Please see current catalog]

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BENG 5700 - Introduction to Microfabrication


3 credits

Materials, wet chemical cleaning and etch, photolithography, metal deposition, doping, carrier density and conductivity, microfluidics, micro-electronic-mechanical-systems.

Prerequisite/Restriction: PHYS 2210 , PHYS 2215 , PHYS 2220  and PHYS 2225  or permission of instructor

Cross-listed as: ECE 5700  and PHYS 5700 

Semester(s) Traditionally Offered: Spring



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