Apr 03, 2025  
2022-2023 General Catalog 
    
2022-2023 General Catalog ARCHIVED CATALOG: To search archives, MUST use search box to left. Current catalog: catalog.usu.edu.

BENG 5700 - Introduction to Microfabrication


3 credit(s)

This course covers materials, wet chemical cleaning and etch, photolithography, metal deposition, doping, carrier density and conductivity, microfluidics, and micro-electronic-mechanical-systems.

Prerequisite(s): PHYS 2210  or PHYS 2310 , and PHYS 2215 , and PHYS 2220  or  PHYS 2320 , and PHYS 2225  

Registration Restriction(s): Admission to Professional Engineering Program and permission of instructor

Cross-listed as: ECE 5700 MAE 5700 PHYS 5700  
Repeatable for credit: No
Grade Mode: Standard

Course changes effective: Fall 2021